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Nanocolumnar Composite Microstructure of Superhard SiC Thin Film Deposited Using Unbalanced Magnetron Sputtering Method
Author(s) -
Bae K.E.,
Chae K.W.,
Park J.K.,
Lee W.S.,
Baik Y.J.
Publication year - 2016
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.201600008
Subject(s) - materials science , microstructure , sputter deposition , amorphous solid , composite number , thin film , crystallite , composite material , sputtering , cavity magnetron , metallurgy , nanotechnology , crystallography , chemistry
Nano‐composite microstructure composed of nano‐columnar SiC crystalline grains embedded in an amorphous SiC matrix is responsible for the superhardness of the SiC thin film deposited using unbalanced magnetron sputtering. Hardness larger than 40 GPa, which is much larger than polycrystalline SiC materials, is obtained by controlling its microstructure of the SiC thin films.