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Nanoscale Materials Patterning by Local Electrochemical Lithography
Author(s) -
Liu He,
Hoeppener Stephanie,
Schubert Ulrich S.
Publication year - 2016
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.201500486
Subject(s) - lithography , materials science , nanotechnology , nanoscopic scale , substrate (aquarium) , photolithography , optoelectronics , oceanography , geology
Scanning probe lithography (SPL) techniques are mainly based on electrical, mechanical, and thermal interactions between a tip and substrates. By comparison, the electrical field‐induced SPL is highly attractive because a variety of chemical changes can be induced on the surface based on electrochemical reactions taking place during the lithography processes. In this review, we provide an overview of recent advances in the field of electrical field‐induced SPL processes, i.e., the local electrochemical lithography. Different substrate materials are discussed, and new concepts, applications and technological improvements are presented.