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Light Management of Aluminum Doped Zinc Oxide Thin Films by Fabricating Periodic Surface Textures Using Direct Laser Interference Patterning
Author(s) -
Eckhardt Sebastian,
Roch Teja,
Sachse Christoph,
Lasagni Andrés Fabián
Publication year - 2013
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.201300007
Subject(s) - materials science , thin film , doping , laser , diffraction , hexagonal crystal system , micrometer , optoelectronics , aluminium , interference (communication) , zinc , oxide , optics , nanotechnology , composite material , metallurgy , crystallography , channel (broadcasting) , physics , chemistry , electrical engineering , engineering
Large area micro and sub‐micrometer structuring of TCO thin film layers is performed using a laser based one‐step procedure. The fabricated hexagonal arranged surface patterns with 800 nm spatial period show a higher performance in both transparency and diffraction properties compared to line‐like textured and non‐patterned substrates. Furthermore, non‐significant variations of the electrical resistance are observed after the laser treatment.