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Free‐Standing Patterned Ceramic Structures Obtained by Soft Micromolding
Author(s) -
Seils Sascha,
Baraki Raschid,
Jamin Christine,
Guillon Olivier
Publication year - 2011
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.201100013
Subject(s) - materials science , ceramic , soft lithography , composite material , substrate (aquarium) , elastomer , wafer , microelectromechanical systems , amorphous solid , inert gas , sapphire , nanotechnology , fabrication , optics , laser , medicine , oceanography , alternative medicine , geology , chemistry , organic chemistry , physics , pathology
Patterned ceramic films with constant thickness can be processed by a soft lithographic method. By using micromolding in capillaries, the slurry is forced to flow through channels created in an elastomer stamp. After drying, layers deposited on an amorphous carbon substrate were sintered under inert atmosphere. Free‐standing ceramic structures with high aspect ratio were obtained with lateral resolution better than 1 µm. Dimensional changes were monitored in comparison to films deposited on stiff sapphire substrate. This technique enables to process a large variety of structures, from optical or electronic components to sieve and MEMS applications.