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Micrometer‐Sized Specimen Preparation Based on Ion Slicing Technique
Author(s) -
Wurster Stefan,
Motz Christian,
Jenko Monika,
Pippan Reinhard
Publication year - 2010
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.200900263
Subject(s) - materials science , micrometer , focused ion beam , slicing , cantilever , transmission electron microscopy , nanotechnology , ion beam , ultimate tensile strength , nanometre , ion , composite material , optics , mechanical engineering , physics , quantum mechanics , engineering
The ion slicing technique has been well known for producing samples for transmission electron microscopy (TEM) investigations. It will be shown that this method can also be used for producing different types of samples for micro‐mechanical experiments. The capability of manufacturing thin freestanding lamellae with a width of some micrometers and subsequently cantilevers and tensile testing specimens on the micrometer‐scale using the focused ion beam (FIB) technique will be demonstrated.