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Characterizations of Magnetron Sputtered CrSiN/ZrN Multilayer Coatings—from Structure to Tribological Behaviors
Author(s) -
Zhang Zhiguo,
Rapaud Olivier,
Allain Nathalie,
Mercs David,
Baraket Mira,
Dong Chuang,
Coddet Christian
Publication year - 2009
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.200900051
Subject(s) - materials science , amorphous solid , microstructure , tribology , sputter deposition , cavity magnetron , metallurgy , composite material , layer (electronics) , modulation (music) , sputtering , thin film , nanotechnology , crystallography , chemistry , philosophy , aesthetics
In this study, CrSiN/ZrN multilayer coatings were prepared by a reactive magnetron sputtering system. The evolution of their microstructure, mechanical, and tribological properties as a function of the multilayer modulation period was studied. The results showed that the multilayers had a good modulation structure. CrSiN and ZrN individual layer in the multilayers were “amorphous‐like” and amorphous structure, respectively.