Premium
Studies on Diamond‐like Carbon Coatings for the Application in Micro Actuators
Author(s) -
Paulkowski D.,
Bandorf R.,
Achilles S.,
Pape F.,
Gatzen H. H.,
Bräuer G.
Publication year - 2008
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.200800051
Subject(s) - materials science , microelectromechanical systems , diamond like carbon , diamond , actuator , carbon fibers , reliability (semiconductor) , nanotechnology , composite material , thin film , composite number , electrical engineering , engineering , power (physics) , physics , quantum mechanics
Minimizing wear and friction in the contact area of the sliding parts of Micro‐Electro‐ Mechanical System (MEMS) components is of utmost importance for the functionally and reliability. Diamond‐like carbon (DLC) coatings were deposited on samples made of materials commonly used in active MEMS devices.