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Thermal Stability of Thin Film Corundum‐Type Solid Solutions of (Al 1–x Cr x ) 2 O 3 Synthesized Under Low‐Temperature Non‐Equilibrium Conditions
Author(s) -
Ramm J.,
Ante M.,
Brändle H.,
Neels A.,
Dommann A.,
Döbeli M.
Publication year - 2007
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.200700081
Subject(s) - corundum , materials science , solid solution , crystallinity , thermal stability , evaporation , fabrication , thin film , analytical chemistry (journal) , mineralogy , chemical engineering , metallurgy , thermodynamics , nanotechnology , composite material , physics , engineering , chemistry , chromatography , medicine , alternative medicine , pathology
A novel cathodic arc evaporation process operated in pure oxygen forms corundum‐type micro‐crystalline structures at temperatures below 600°C. Thermally stable crystalline solid solutions of corundum‐type (Al 1–x Cr x ) 2 O y have been prepared with this method for x ≥ 0.3 at non‐equilibrium conditions. The stability in (Al,Cr) 2 O 3 phases can be explained by their degree of crystallinity and ordering within the structure. The applied processing method results in highly crystalline coatings of pure α‐(Al 1–x Cr x ) 2 O y . With increasing fabrication temperature (maximum 600°), more stable phases are obtained showing no metal site splitting in the atomic structure.