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Formation of Nanostructured Titania: Effect of Thickness on Oxidation Kinetics of Titanium Thin Films in Aqueous Hydrogen Peroxide
Author(s) -
DeRosa D. M.,
Zuruzi A. S.,
MacDonald N. C.
Publication year - 2006
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.200500186
Subject(s) - materials science , hydrogen peroxide , kinetics , aqueous solution , grain size , titanium , oxide , thin film , chemical engineering , peroxide , titanium oxide , inorganic chemistry , metallurgy , nanotechnology , chemistry , organic chemistry , physics , quantum mechanics , engineering
The oxidation kinetics of Ti films in aqueous hydrogen peroxide was investigated. Oxidation of Ti films is dependent on both film thickness and average grain size. Films of thickness 50 nm or less exhibit Stage I oxidation while thicker films exhibit both Stages I and II. The difference in oxidation rates and dependencies on grain size observed in these two stages are attributed to different mechanisms controlling oxide growth.