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Quantitative Elastic‐Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy
Author(s) -
Hurley D. C.,
KopycinskaMüller M.,
Kos A. B.,
Geiss R. H.
Publication year - 2005
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.200500039
Subject(s) - materials science , nanoscopic scale , atomic force microscopy , nanomechanics , metrology , atomic force acoustic microscopy , nanotechnology , elastic modulus , resolution (logic) , nanoindentation , microscopy , property (philosophy) , composite material , optics , magnetic force microscope , computer science , physics , magnetization , quantum mechanics , artificial intelligence , magnetic field , philosophy , epistemology
We are developing metrology for rapid, quantitative assessment of elastic properties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable measurements of modulus at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.