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Deformation Behavior of Free‐Standing Pd‐based Thin Film Metallic Glass for Micro Electro Mechanical Systems Applications
Author(s) -
Zhang G.P.,
Liu Y.,
Zhang B.
Publication year - 2005
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.200400187
Subject(s) - materials science , amorphous metal , shear band , annealing (glass) , supercooling , shear (geology) , deformation (meteorology) , composite material , thin film , deformation mechanism , metallurgy , bending , alloy , microstructure , nanotechnology , thermodynamics , physics
The deformation behavior of thin film metallic glasses (TFMG) both as‐deposited and annealed at the supercooled liquid region (SCLR) near the T g were investigated by bending TFMG microbeams. It was found that the shear banding behavior, the stress for operating the first shear band and the plastic shear displacement along the shear band plane were dependent on annealing time at the T g . The deformation mechanism and the controlling of mechanical properties of the TFMG were discussed.