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Cross Linking Behavior of Preceramic Polymers Effected by UV‐ and Synchrotron Radiation
Author(s) -
Schulz M.,
Börner M.,
Göttert J.,
Hanemann T.,
Haußelt J.,
Motz G.
Publication year - 2004
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.200400082
Subject(s) - materials science , ceramic , lithography , fabrication , polymer , microstructure , pyrolysis , synchrotron radiation , nanotechnology , composite material , optoelectronics , chemical engineering , optics , medicine , alternative medicine , physics , pathology , engineering
Ceramic properties are important for applications in micro system technologies. Various lithographic methods are being widely used for the direct fabrication of very precise plastic or metal micro structured surfaces. High temperature stable ceramics can be achieved from preceramic polymers using relatively low pyrolysis temperatures. A direct lithographic process to produce ceramic microstructures has been developed.