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Microfabrication of Three‐Dimensional, Free‐Standing Ceramic MEMS Components by Soft Moulding
Author(s) -
Zhang D.,
Su B.,
Button T.W.
Publication year - 2003
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/adem.200300518
Subject(s) - microfabrication , materials science , fabrication , microelectromechanical systems , ceramic , photoresist , micrometer , composite material , injection moulding , polymer , nanotechnology , mechanical engineering , medicine , alternative medicine , pathology , layer (electronics) , engineering
This paper describes a soft moulding technique for the near net‐shape fabrication of three‐dimensional (3D) free‐standing ceramic structures with dimensions in the micrometer range for application in the micro‐electromechanical systems (MEMS). Highly concentrated alumina suspensions have been patterned on thin photoresist layers coated on alumina substrates by the use of soft polymer moulds.