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The implementation of low‐power and wide tuning range MEMS filters for communication applications
Author(s) -
Göktaş H.,
Zaghloul M. E.
Publication year - 2016
Publication title -
radio science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.371
H-Index - 84
eISSN - 1944-799X
pISSN - 0048-6604
DOI - 10.1002/2015rs005893
Subject(s) - resonator , microelectromechanical systems , beam (structure) , range (aeronautics) , materials science , power (physics) , voltage , biasing , dielectric , electronic engineering , acoustics , computer science , electrical engineering , optoelectronics , optics , physics , engineering , quantum mechanics , composite material
Theory and optimization were studied in detail to find optimum dimensions of fixed‐fixed beam for the sake of low‐power and wide‐range frequency tuning applications. This optimization also provides a method to avoid device failure due to high thermal stress. The good agreement between theory, simulation, and measurement is achieved and can serve as a guidance for future works. Two resonators, consisting of multiple metal, dielectric, and polysilicon layers, were designed; the first resonator at 303.4 kHz and the second at 2053 kHz achieve the frequency tuning ranges of 35.7%–42.6%, respectively. A power consumption of 900 μW/beam is achieved for the first design of 152 µm length beam while providing a frequency tuning of 35.7%. Further increase in the tuning capability was achieved by the increase in the applied DC bias voltage between adjacent beams.