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The implementation of low‐power and wide tuning range MEMS filters for communication applications
Author(s) -
Göktaş H.,
Zaghloul M. E.
Publication year - 2016
Publication title -
radio science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.371
H-Index - 84
eISSN - 1944-799X
pISSN - 0048-6604
DOI - 10.1002/2015rs005893
Subject(s) - resonator , microelectromechanical systems , beam (structure) , range (aeronautics) , materials science , power (physics) , voltage , biasing , dielectric , electronic engineering , acoustics , computer science , electrical engineering , optoelectronics , optics , physics , engineering , quantum mechanics , composite material
Abstract Theory and optimization were studied in detail to find optimum dimensions of fixed‐fixed beam for the sake of low‐power and wide‐range frequency tuning applications. This optimization also provides a method to avoid device failure due to high thermal stress. The good agreement between theory, simulation, and measurement is achieved and can serve as a guidance for future works. Two resonators, consisting of multiple metal, dielectric, and polysilicon layers, were designed; the first resonator at 303.4 kHz and the second at 2053 kHz achieve the frequency tuning ranges of 35.7%–42.6%, respectively. A power consumption of 900 μW/beam is achieved for the first design of 152 µm length beam while providing a frequency tuning of 35.7%. Further increase in the tuning capability was achieved by the increase in the applied DC bias voltage between adjacent beams.