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Analytical Calculation of Sensitivity for Capacitive Pressure Transducers
Author(s) -
Kovács Á.,
Vízváry Zs.
Publication year - 2002
Publication title -
pamm
Language(s) - English
Resource type - Journals
ISSN - 1617-7061
DOI - 10.1002/1617-7061(200203)1:1<135::aid-pamm135>3.0.co;2-j
Subject(s) - deflection (physics) , capacitive sensing , transducer , pressure sensor , acoustics , diaphragm (acoustics) , materials science , engineering , physics , electrical engineering , mechanical engineering , vibration , optics
Calculation of sensitivity for capacitive pressure transducers requires the integration of the deflection function of a clamped‐edge thin diaphragm. For typical square‐formed diaphragms we integrated analytically a closed form deflection function obtained by the Ritz‐method. This exact integration enables fast and accurate simulation.