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Growth of Single‐Walled Carbon Nanotubes from Microcontact‐Printed Catalyst Patterns on Thin Si 3 N 4 Membranes
Author(s) -
Gu G.,
Philipp G.,
Wu X.,
Burghard M.,
Bittner A. M.,
Roth S.
Publication year - 2001
Publication title -
advanced functional materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 6.069
H-Index - 322
eISSN - 1616-3028
pISSN - 1616-301X
DOI - 10.1002/1616-3028(200108)11:4<295::aid-adfm295>3.0.co;2-2
Subject(s) - materials science , microcontact printing , carbon nanotube , membrane , nanotechnology , catalysis , chemical engineering , thin film , organic chemistry , chemistry , genetics , biology , engineering
Single‐walled carbon nanotubes have been grown by chemical vapor deposition from methane and hydrogen on catalyst patterns prepared by microcontact printing on 20 nm thick silicon nitride substrates. A higher yield of single‐walled carbon nanotubes was obtained by the simple expedient of introducing hydrogen during deposition. Based on atomic force microscopy and transmission electron microscopy measurements, we found that high‐quality single‐walled carbon nanotubes with a broad diameter distribution were obtained.