Premium
Mechanical Testing of Thin Films and Small Structures
Author(s) -
Kraft O.,
Volkert C. A.
Publication year - 2001
Publication title -
advanced engineering materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/1527-2648(200103)3:3<99::aid-adem99>3.0.co;2-2
Subject(s) - microelectromechanical systems , materials science , fabrication , thin film , nanotechnology , semiconductor , semiconductor device , engineering physics , optoelectronics , engineering , medicine , alternative medicine , pathology , layer (electronics)
Thin films, as well as small structures, are used in many technical applications, such as semiconductor devices, information storage media, microelectromechanical systems (MEMS), and biomedical devices. The knowledge of materials properties is essential for the design and fabrication of these devices, particularly since small structures often have different properties than their bulk counterparts. This article describes the most common experimental techniques used to measure mechanical properties in small dimensions.