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Publication year - 2002
Publication title -
vakuum in forschung und praxis
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/1522-2454(200202)14:1<6::aid-vipr6>3.0.co;2-#
Subject(s) - electrical engineering , engineering