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Ein‐Quellen‐Verdampfungstechnik zur Aufdampfung komplexer Schichten
Author(s) -
Pulker Hans K.
Publication year - 2000
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/1522-2454(200006)12:3<197::aid-vipr197>3.0.co;2-n
Subject(s) - flash evaporation , evaporation , flash (photography) , materials science , nanotechnology , chemistry , optics , physics , thermodynamics , chromatography
Flash evaporation is a one‐source evaporation technique to deposit complex multicomponent film materials in a relatively simple way onto various substrates. To perform this technique special material preparation and special devices are required.