Premium
Evaluation of a Chip‐Based Thin‐Film / Thick‐Film Sensor Hybrid for (Bio‐)Chemical Analysis
Author(s) -
Schöning Michael J.,
Simonis Anette,
Krings Thomas,
Lüth Hans,
Wang Joseph
Publication year - 2002
Publication title -
electroanalysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.574
H-Index - 128
eISSN - 1521-4109
pISSN - 1040-0397
DOI - 10.1002/1521-4109(200207)14:13<955::aid-elan955>3.0.co;2-#
Subject(s) - materials science , thin film , chip , nanotechnology , optoelectronics , chemical sensor , analytical chemistry (journal) , computer science , chemistry , chromatography , telecommunications , electrode
Abstract Both a pH‐sensitive thin‐film sensor and a thick‐film reference electrode have been integrated into a hybrid sensor module that is suitable for (bio‐)chemical analysis in aqueous solutions. The pH‐sensitive thin‐film sensor consists of a capacitive layer structure of Al/p‐Si/SiO 2 /Al 2 O 3 and is prepared by semiconductor‐compatible process steps. The thick‐film reference electrode of p‐Si/Ag/AgCl is printed by conventional screen‐printed technique onto the same silicon substrate. Such combination of the thin‐film sensor and the thick‐film reference allows the realization of a miniaturized sensor hybrid without an external macroscopic reference electrode. Due to its set‐up, the sensor hybrid shows a response characteristic to both H + ‐ and Cl − ‐ions and can be employed in well‐defined analytes, like for biomedical applications. The utility of the new thin‐film / thick‐film sensor hybrid is demonstrated for the determination of the H + ‐ and Cl − ‐ion concentration in aqueous solutions.