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A New Type of Low‐ϰ Dielectric Films Based on Polysilsesquioxanes
Author(s) -
Su R.Q.,
Müller T.E.,
Procházka J.,
Lercher J.A.
Publication year - 2002
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/1521-4095(20021002)14:19<1369::aid-adma1369>3.0.co;2-i
Subject(s) - materials science , hydrosilylation , copolymer , spin coating , condensation , coating , dielectric , hybrid material , chemical engineering , hydrolysis , platinum , sol gel , polymer chemistry , catalysis , composite material , nanotechnology , polymer , optoelectronics , organic chemistry , chemistry , physics , engineering , thermodynamics
A low‐ϰ organic–inorganic hybrid material (see Figure) based on functionalized silsesquioxanes is demonstrated. The preparation is based on platinum‐catalyzed hydrosilylation or hydrolytic condensation of functionalized silsesquioxanes, and by controlling the parameters for spin coating, by which the hybrid copolymer is fabricated, coherent films with a thickness ranging from 22–28 μm can be obtained.