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Siloxane‐Based Hybrid Glass Materials for Binary and Grayscale Mask Photoimaging
Author(s) -
Kärkkäinen A.H.O.,
Rantala J.T.,
Maaninen A.,
Jabbour G.E.,
Descour M.R.
Publication year - 2002
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/1521-4095(20020404)14:7<535::aid-adma535>3.0.co;2-t
Subject(s) - materials science , photomask , fabrication , grayscale , siloxane , hybrid material , microlens , sol gel , lens (geology) , nanotechnology , composite material , optics , polymer , resist , layer (electronics) , pixel , physics , medicine , alternative medicine , pathology
Hybrid (organic–inorganic) glass materials , synthesized by the hybrid sol‐gel method, are demonstrated to have potential for fabrication of micro‐optical and opto‐mechanical structures by UV patterning in a single step. The Figure, an SEM image, shows a micro‐lens array photolithographically patterned in hybrid glass material using a grayscale photomask.