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Gas Sensors Fabricated from Ceramic Suspensions by Micromolding in Capillaries
Author(s) -
Heule M.,
Gauckler L. J.
Publication year - 2001
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/1521-4095(200112)13:23<1790::aid-adma1790>3.0.co;2-c
Subject(s) - materials science , photolithography , nanotechnology , ceramic , colloidal crystal , sapphire , colloid , composite material , chemical engineering , laser , optics , physics , engineering
Micromolding in capillaries has been used to fabricate an array of SnO 2 gas sensors (see Figure) using colloidal suspensions. The micromolding procedure was integrated in a sequence of conventional photolithography steps. Miniaturized gas sensors on sapphire single crystal substrates showed responses of 100 ppm for H 2 and 600 ppm for CO, the active sensing area being only 10 by 40 μm 2 .