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Patterned Microstructure of Sol–Gel Derived Complex Oxides Using Soft Lithography
Author(s) -
Seraji S.,
Wu Y.,
JewellLarson N. E.,
Forbess M. J.,
Limmer S. J.,
Chou T. P.,
Cao G.
Publication year - 2000
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/1521-4095(200010)12:19<1421::aid-adma1421>3.0.co;2-4
Subject(s) - materials science , microstructure , soft lithography , lithography , nanotechnology , sol gel , chemical engineering , composite material , optoelectronics , fabrication , medicine , alternative medicine , pathology , engineering
Direct patterning of complex oxides is reported here for the first time. Using a combination of soft lithography with sol‐gel processing, patterned microstructures of the piezoelectric materials Pb(ZrTi)O 3 (see Figure) and Sr 2 Nb 2 O 7 on silicon substrates were created as model systems. It was found that dense complex oxides with the desired perovskite structures were formed after annealing at 700–800 °C.