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Microfabrication of Ceramics by Filling of Photoresist Molds
Author(s) -
Schönholzer U. P.,
Hummel R.,
Gauckler L. J.
Publication year - 2000
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/1521-4095(200009)12:17<1261::aid-adma1261>3.0.co;2-4
Subject(s) - materials science , photoresist , microfabrication , ceramic , wafer , mold , resist , substrate (aquarium) , silicon , sapphire , composite material , molding (decorative) , coating , polymer , nanotechnology , fabrication , optoelectronics , optics , laser , layer (electronics) , medicine , oceanography , alternative medicine , physics , pathology , geology
Filling of photo‐resist molds is a new method for the generation of micropatterned ceramic surfaces. A flat substrate is first patterned with a photoresist. The ceramic coating is then applied to the substrates by pouring 50 vol.‐% alumina suspension over the mold, excess material being removed with a polymer blade (see Figure). Alumina structures of high quality were produced on silicon wafers and on sapphire single crystals.