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Experimental Verification of the Numerical Model for a CaF 2 Crystal Growth Process
Author(s) -
Molchanov A.,
Hilburger U.,
Friedrich J.,
Finkbeiner M.,
Wehrhan G.,
Müller G.
Publication year - 2002
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/1521-4079(200202)37:1<77::aid-crat77>3.0.co;2-k
Subject(s) - wafer , crystal growth , materials science , crystal (programming language) , heat transfer , fabrication , process (computing) , computer simulation , mechanical engineering , mechanics , optoelectronics , computer science , chemistry , crystallography , simulation , engineering , physics , medicine , alternative medicine , pathology , operating system , programming language
Large calcium fluoride (CaF 2 ) single crystals are required for the fabrication of lenses in so‐called wafer‐steppers of future IC‐lithography technologies operating at 193 nm and 157 nm. Numerical simulation plays an important role to design an adequate growth setup and processing conditions for the growth of high quality crystals. An important issue is the consideration of the internal heat transfer by radiation in the semitransparent CaF 2 during the crystal growth process. Results of the numerical modeling of the heat transport are presented, which are obtained by using the software package CrysVUn++ with different models considering the internal heat transport in CaF 2 . To improve the availability of experimental data on CaF 2 bulk growth, an especially designed R&D‐facility was built. This growth system is equipped with a variety of in‐situ measurement systems to detect the temperature distributions in the crystal and melt region. Calculated temperature distributions are compared with experimental data. Also first results on single crystal growth will be reported.