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Investigations on Nanoscale Multilayers by Analytical TEM in Scanning Mode
Author(s) -
Thomas J.,
Bauer H.D.,
Baunack S.,
Wetzig K.
Publication year - 2000
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/1521-4079(200007)35:6/7<839::aid-crat839>3.0.co;2-#
Subject(s) - nanoscopic scale , materials science , nanometre , transmission electron microscopy , nanotechnology , scanning transmission electron microscopy , tin , scanning electron microscope , coating , composite material , metallurgy
Nanoscale multilayers show properties completely different from bulk materials and are of great interest in the modern materials science. The characterisation of their structure and composition requires methods with spatial resolution of only few nanometers. The analytical transmission electron microscopy on cross sections is one of the most suitable methods. Imaging and spectroscopy of the same specimen details lead to essential information about correlation of structure and properties. The use of the analytical TEM with possibilities and limitations in the scanning mode will be demonstrated on four materials problems: oxygen bond in thin resistivity films (CuNi/NiCr), hard coating multilayers (TiN/Al 2 O 3 ), and Fe/Al multilayers, as well as the degree of mixing within nanoscale Co/Cu multilayers.