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Bragg Diffraction of X‐Rays by Single Crystals with Large Microdefects
Author(s) -
Kislovskii E.N.,
Olikhovskii S.I.,
Molodkin V.B.,
Nemoshkalenko V.V.,
Krivitsky V.P.,
Len E.G.,
Pervak E.V.,
Ice G.E.,
Larson B.C.
Publication year - 2002
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/1521-3951(200205)231:1<213::aid-pssb213>3.0.co;2-c
Subject(s) - diffractometer , diffraction , crystallography , dislocation , materials science , silicon , diffraction topography , scattering , single crystal , bragg's law , optics , x ray crystallography , dynamical theory of diffraction , molecular physics , condensed matter physics , crystal structure , chemistry , physics , optoelectronics , acousto optics , diffraction grating
The generalized dynamical theory of X‐ray scattering by single crystals containing randomly distributed microdefects has been applied to characterize structural imperfections in the Czochralski‐grown dislocation‐free silicon sample annealed at 1080 °C during 6 h. Measurements of rocking curves for 111 and 333 reflections of CuK α1 radiation have been performed by the high‐resolution double‐crystal diffractometer. The sizes and concentrations of oxygen precipitates and dislocation loops, which have been determined by independent fitting of the two rocking curves, are in good agreement confirming the validity of the developed theory.