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Heat‐Induced Polymerization of a‐CN x Films Grown by Pulsed Laser Deposition
Author(s) -
Soto G.
Publication year - 2002
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/1521-3951(200204)230:2<351::aid-pssb351>3.0.co;2-1
Subject(s) - x ray photoelectron spectroscopy , carbon nitride , carbon fibers , polymerization , quadrupole mass analyzer , carbon film , desorption , amorphous solid , materials science , mass spectrometry , analytical chemistry (journal) , deposition (geology) , chemical engineering , nitrogen , pulsed laser deposition , chemical vapor deposition , amorphous carbon , thin film , chemistry , polymer , organic chemistry , nanotechnology , composite material , composite number , engineering , biology , paleontology , chromatography , photocatalysis , adsorption , catalysis , sediment
A series of amorphous carbon nitride (a‐CN x ) films have been prepared on silicon substrates by pulsed laser deposition. The films were heated from room temperature up to 900 °C in 50 °C steps. The chemical states and gas desorption were recorded simultaneously, as a function of temperature, by means of in‐situ X‐ray photoelectron spectroscopy (XPS) and quadrupole mass spectrometer. Nitrogen is incorporated to sp 2 ‐carbon structures in two‐favored configuration: pyridinic and pyrrolic. The heat treatment induces a two‐dimensioned polymerization that takes place upon rupture of the pyridinic and pyrrolic rings, followed by cycle‐addition of nearby carbon rings and gasification of C 2 N 2 and other species.