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Atomic Resolution Scanning Transmission Electron Microscopy
Author(s) -
Browning N.D.,
Arslan I.,
Moeck P.,
Topuria T.
Publication year - 2001
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/1521-3951(200109)227:1<229::aid-pssb229>3.0.co;2-f
Subject(s) - scanning transmission electron microscopy , scanning confocal electron microscopy , materials science , resolution (logic) , transmission electron microscopy , energy filtered transmission electron microscopy , microscopy , high resolution transmission electron microscopy , optics , conventional transmission electron microscope , image resolution , dislocation , quantum dot , electron , scanning electron microscope , optoelectronics , nanotechnology , physics , computer science , artificial intelligence , quantum mechanics , composite material
Recent developments in scanning transmission electron microscopy (STEM) now make it routinely possible to obtain direct images and spectra from interface and defects structures with atomic spatial resolution. Here we describe the experimental conditions required to set‐up and align a 200 kV STEM/TEM microscope to perform this analysis. The various imaging and analysis techniques will be illustrated with examples from interfaces in II–VI and III–V quantum dot systems and dislocation cores in GaN.