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Chemical vapour deposition of selenium and tellurium films by UV laser photolysis of selenophene and tellurophene
Author(s) -
Pola Josef,
Bastl Zdeněk,
Šubrt< Jan,
Ouchi Akihiko
Publication year - 2000
Publication title -
applied organometallic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.53
H-Index - 71
eISSN - 1099-0739
pISSN - 0268-2605
DOI - 10.1002/1099-0739(200011)14:11<715::aid-aoc63>3.0.co;2-0
Subject(s) - chemistry , selenium , photodissociation , tellurium , x ray photoelectron spectroscopy , chemical vapor deposition , excimer laser , photochemistry , deposition (geology) , chalcogen , organic chemistry , laser , chemical engineering , optics , paleontology , physics , sediment , engineering , biology
Excimer laser‐induced photolysis of gaseous selenophene and tellurophene affords gaseous 1‐buten‐3‐yne and ethyne (as major products) and butadiyne (a very minor product) and results in chemical vapour deposition of selenium and tellurium films. The film properties were characterized by XPS and SEM techniques and by UV spectroscopy. Copyright © 2000 John Wiley & Sons, Ltd.