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The effect of longitudinal substrate currents on the losses in silicon substrate coplanar‐strip and coplanar waveguides
Author(s) -
Berg Håkan,
Gevorgian Spartak
Publication year - 2000
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/1099-047x(200009)10:5<284::aid-mmce3>3.0.co;2-2
Subject(s) - substrate (aquarium) , strips , microwave , coplanar waveguide , silicon , materials science , optoelectronics , electrical engineering , composite material , engineering , telecommunications , geology , oceanography
The strip currents in silicon substrate CPS and CPW induce longitudinal currents in the substrate (along the strips of the lines) causing extra microwave losses. It is shown that these losses may be minimized without introducing extra masks and process steps if the slot widths in the lines are chosen properly. © 2000 John Wiley & Sons, Inc. Int J RF and Microwave CAE 10: 284–288, 2000.