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MSM photodetector with an integrated microlens array for improved optical coupling
Author(s) -
Ozelo H. F. B.,
De Barros L. E. M.,
Nabet B.,
Neto L. G.,
Romero M. A.,
Ramos A. C. S.,
Swart J. W.
Publication year - 2000
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/1098-2760(20000920)26:6<357::aid-mop3>3.0.co;2-w
Subject(s) - microlens , photodetector , photocurrent , optoelectronics , planar , coupling (piping) , materials science , optics , microwave , fabrication , optical coupling , physics , optical fiber , engineering , telecommunications , computer science , lens (geology) , medicine , computer graphics (images) , alternative medicine , pathology , metallurgy
A novel technique to enhance the optical coupling efficiency of planar photodetectors is described. It consists of the fabrication of an array of integrated cylindrical microlenses on top of an MSM. Results show an 11% increase in the photocurrent and it is demonstrated how total optical coupling may be achieved. © 2000 John Wiley & Sons, Inc. Microwave Opt Technol Lett 26: 357–360, 2000.