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Secondary ion mass spectrometric investigation on ruthenium oxide systems: a comparison between poly‐ and nanocrystalline deposits
Author(s) -
Barison Simona,
Barreca Davide,
Daolio Sergio,
Fabrizio Monica,
Piccirillo Clara
Publication year - 2000
Publication title -
rapid communications in mass spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.528
H-Index - 136
eISSN - 1097-0231
pISSN - 0951-4198
DOI - 10.1002/1097-0231(20000730)14:14<1179::aid-rcm6>3.0.co;2-h
Subject(s) - nanocrystalline material , crystallite , chemistry , oxide , secondary ion mass spectrometry , chemical vapor deposition , diffusion , ruthenium oxide , reactivity (psychology) , ruthenium , analytical chemistry (journal) , deposition (geology) , ion , chemical engineering , inorganic chemistry , crystallography , catalysis , chromatography , organic chemistry , medicine , physics , alternative medicine , pathology , engineering , thermodynamics , paleontology , sediment , biology
The influence of different RuO 2 crystallite sizes was investigated by secondary ion mass spectrometry (SIMS) on the oxide deposited on various support materials (Ni, Ti, Al 2 O 3 , oxidized Si(100)). In order to examine the effect of an oxidic environment on the film structure, RuO 2 20%‐TiO 2 80% at. mixed oxide was deposited on Ti. The polycrystalline coatings were prepared by heating the Ru (and Ti)‐containing solution dropped on the supports.1 RuO 2 nanocrystalline coatings were grown by chemical vapor deposition (CVD) from Ru(COD)(η 3 ‐allyl) 2 .2 The identification of mixed oxide clusters showed the higher reactivity of Ni and Al 2 O 3 over the other substrates. Diffusion and migration characteristics were observed to be influenced by the nature of the support. The results are complementary to those of a previous SIMS investigation.3 Copyright © 2000 John Wiley & Sons, Ltd.