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Optimizing the ellipsometric analysis of a transparent layer on glass
Author(s) -
Tompkins Harland G.,
Smith Steven,
Convey Diana
Publication year - 2000
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/1096-9918(200012)29:12<845::aid-sia938>3.0.co;2-q
Subject(s) - refractive index , substrate (aquarium) , layer (electronics) , materials science , optics , ellipsometry , work (physics) , refraction , angle of incidence (optics) , composite material , mineralogy , optoelectronics , thin film , nanotechnology , chemistry , geology , physics , thermodynamics , oceanography
In this work we show how to choose optimum analysis conditions to analyze a transparent film on a transparent substrate where the index of refraction for the film is not very different from that of the substrate. We show that there are three ‘zones’ from which to choose the angle of incidence and that one should choose one angle in each zone. We discuss theoretically the basis of these three zones and how to determine the boundaries. Oxynitride on glass and polymer on glass are used as examples and the data and analysis are shown. Copyright © 2000 John Wiley & Sons, Ltd.