Premium
Degradation of organosilane monolayer during XPS measurement
Author(s) -
Suzuki Noboru,
Isano Taisuke,
Sakamoto Tomofumi,
Saino Tsuyoshi,
Iimura Kenichi,
Kato Teiji
Publication year - 2000
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/1096-9918(200008)30:1<301::aid-sia766>3.0.co;2-i
Subject(s) - monolayer , nitrocellulose , x ray photoelectron spectroscopy , wafer , substrate (aquarium) , polymer , degradation (telecommunications) , chemistry , adhesive , analytical chemistry (journal) , silicon , materials science , chemical engineering , organic chemistry , nanotechnology , layer (electronics) , telecommunications , biochemistry , oceanography , membrane , geology , computer science , engineering
We have demonstrated methods to evaluate surface damage of organic materials during XPS measurement using nitrocellulose as a reference material and proposed ‘relative x‐ray dose’, ‘apparatus damaging factor’ and ‘specific damaging factor’ as available factors for evaluation. In this paper, the usefulness of organosilane monolayer prepared on silicon wafer substrate by modification using 3‐chloropropyltriethoxysilane (CTES) has been examined as an alternative or more suitable reference material for comparative evaluations of measuring conditions. From changes in the area intensity and the peak shape, degradation of the CTES monolayer is confirmed to obey a first‐order reaction rate and to proceed through the scission of C–Cl bonds. All the analysing methods and the parameters proposed for nitrocellulose are also recognized to be applicable to this CTES monolayer. The ‘apparatus damaging factor’ of the monolayer is obtained as 2.5 × 10 −10 cps −1 eV −1 s −1 , which is a quarter of that for nitrocellulose and is considered to be of the same order as many degradable polymers. Furthermore, there is no change in the pressure of the analysis chamber during XPS measurement, owing to the extremely small amount of organic material. Thus, it is concluded that the CTES monolayer is a better reference material than nitrocellulose for the evaluation of surface damage of degradable material, and that the evaluation method applied here could be a standard one. Copyright © 2000 John Wiley & Sons, Ltd.