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Experimental determination of the inelastic mean free path of electrons in GaP and InAs
Author(s) -
Gergely G.,
Menyhard M.,
Gurban S.,
Benedek Zs.,
Daroczi Cs.,
Rakovics V.,
Tóth J.,
Varga D.,
Krawczyk M.,
Jablonski A.
Publication year - 2000
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/1096-9918(200008)30:1<195::aid-sia803>3.0.co;2-f
Subject(s) - inelastic mean free path , auger electron spectroscopy , x ray photoelectron spectroscopy , electron , mean free path , electron spectroscopy , inelastic scattering , atomic physics , elastic scattering , crystallinity , chemistry , scattering , analytical chemistry (journal) , materials science , physics , nuclear physics , crystallography , nuclear magnetic resonance , optics , chromatography
The inelastic mean free path (IMFP) of electrons is a fundamental material parameter needed for surface analysis. The IMFP data of semiconducting III–V compounds have been calculated by Tanuma et al. , Kwei et al. and Gries. The present paper completes previous research and reports experimental studies on the IMFPs of GaP and InAs. Elastic peak electron spectroscopy (EPES) was used with Ni, Au and Ag reference samples. Both InAs(100) and GaP(100) have been studied in three laboratories, using different types of electron spectrometer analysers and energy ranges: HSA (0.2–5 keV), DCMA (0.2–2 keV), DESA 100 (0.5–2 keV). The surface of the samples was cleaned and amorphized by Ar + ion bombardment with controlled parameters (energy, dose, etc.) to eliminate crystallinity effects. The surface composition of the ion‐bombarded samples was determined in situ by XPS and Auger electron spectroscopy. Their crystallinity and incoherent elastic scattering were tested with Renninger plots of the elastic peak intensity, rotating the sample around its axis perpendicular to the surface. The IMFPs were calculated by a Monte Carlo algorithm using the NIST database of elastic scattering cross‐sections. A reasonable agreement was found with theoretical IMFP values calculated by other authors. Copyright © 2000 John Wiley & Sons, Ltd.