Premium
SiN x ‐Submicrometer Coatings: Optimization of Film Properties
Author(s) -
Tikana L.,
Pohl M.,
Zösch A.,
Zahn W.,
Wuttke W.
Publication year - 2000
Publication title -
advanced engineering materials
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.938
H-Index - 114
eISSN - 1527-2648
pISSN - 1438-1656
DOI - 10.1002/(sici)1527-2648(200002)2:1/2<53::aid-adem53>3.0.co;2-f
Subject(s) - materials science , composite material , nanotechnology
No abstracts