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Fabrication and Sensing Applications of Microelectrodes on Silicon Substrates
Author(s) -
Andrews Michael K.,
Harris Paul D.
Publication year - 1998
Publication title -
electroanalysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.574
H-Index - 128
eISSN - 1521-4109
pISSN - 1040-0397
DOI - 10.1002/(sici)1521-4109(199811)10:16<1112::aid-elan1112>3.0.co;2-z
Subject(s) - microelectrode , fabrication , nanotechnology , silicon , electrode , materials science , multielectrode array , diffusion , electrochemistry , optoelectronics , chemistry , physics , medicine , alternative medicine , pathology , thermodynamics
The unique properties of microelectrodes have been appreciated by electrochemists for some years, but the development of sensors which use these properties, in particular the high diffusion rates near the electrodes, has been slow. We consider first the dimensions which define microelectrodes. Silicon fabrication methods are well able to reach these, but the technology, outlined for a simple case of the production of an electrode array, is specialized. Progress in developing sensors will best be made by collaborations between engineering and electrochemistry groups. Examples of sensors and devices which utilize microelectrodes are given. Three depend on the high diffusion fluxes which can be established near microelectrodes, and one uses the fact that microstructures can be made which have features comparable in size to living cells. The resulting nonuniform electric fields allow cells to be manipulated.