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Thin‐Film Microfabrication of Electrochemical Transducers
Author(s) -
Fiaccabrino Giovanni Carlo,
KoudelkaHep Milena
Publication year - 1998
Publication title -
electroanalysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.574
H-Index - 128
eISSN - 1521-4109
pISSN - 1040-0397
DOI - 10.1002/(sici)1521-4109(199804)10:4<217::aid-elan217>3.0.co;2-w
Subject(s) - microfabrication , microelectrode , fabrication , materials science , thin film , electrochemistry , nanotechnology , transducer , electrode , computer science , electrical engineering , chemistry , engineering , medicine , alternative medicine , pathology
Thin‐film technology provides definite advantages for producing small‐dimension electrodes and electrochemical transducers. The aim of this review article is to describe the main technological steps of microfabrication. Three selected examples, derived from research in our laboratory, are used to illustrate basic concepts as well as some nonstandard processes available for the fabrication of thin‐film Pt, Au, Ir and C microelectrodes.