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Parallel Patterning of Mesoscopic Ring Arrays Using Nanochannel Glass Replica Masks
Author(s) -
Pearson Douglas H.,
Tonucci Ronald J.,
Bussmann Konrad M.,
Bolden Elizabeth A.
Publication year - 1999
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/(sici)1521-4095(199906)11:9<769::aid-adma769>3.0.co;2-i
Subject(s) - mesoscopic physics , materials science , replica , ring (chemistry) , substrate (aquarium) , layer (electronics) , nanotechnology , lithography , optoelectronics , condensed matter physics , art , chemistry , physics , oceanography , organic chemistry , geology , visual arts
Dense arrays of hollow mesoscopic ring structures have been produced using nanochannel glass replica mask technology. The Figure shows Au rings on a Cr‐coated Si substrate. The mask is used initially to deposit the gold dots. An Mo layer is then deposited at a glancing angle, which reduces the hole size, and the center portions of the dots are then milled away to leave the rings.