Premium
Templating Nanoporosity in Thin‐Film Dielectric Insulators
Author(s) -
Hedrick James L.,
Miller Robert D.,
Hawker Craig J.,
Carter Kenneth R.,
Volksen Willi,
Yoon Do Y.,
Trollsås Mikael
Publication year - 1998
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/(sici)1521-4095(199809)10:13<1049::aid-adma1049>3.0.co;2-f
Subject(s) - materials science , nanoporous , dielectric , polyimide , thin film , fabrication , copolymer , porosity , nanopore , nanotechnology , composite material , optoelectronics , polymer , layer (electronics) , medicine , alternative medicine , pathology
Porous thin‐film dielectric insulators with significantly lower dielectric constants are expected to have great impact on the fabrication of ever smaller semiconductor devices and chips with higher packaging densities. Here two routes to the preparation of such nanoporous thin films are presented. A method has been developed that generates polyimide foams with nanopores from a block copolymer in which the dispersed phase undergoes thermolysis. The other approach described uses branched, highly functional macromolecules as molecular templates during vitrification of a silesquioxane.