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Ultrathin Diblock Copolymer/Titanium Laminates—A Tool for Nanolithography
Author(s) -
Spatz Joachim P.,
Eibeck Peter,
Mößmer Stefan,
Möller Martin,
Herzog Thomas,
Ziemann Paul
Publication year - 1998
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/(sici)1521-4095(199808)10:11<849::aid-adma849>3.0.co;2-5
Subject(s) - materials science , nanolithography , copolymer , titanium , nanotechnology , composite material , fabrication , metallurgy , polymer , medicine , alternative medicine , pathology
A self‐assembled diblock copolymer mask teamed with conventional ion etching is one approach to nanometer patterning of surfaces. An ultrathin film of polystyrene‐ block ‐poly(2‐vinylpyridine) on mica is shown to yield isolated, regularly arranged clusters of polystyrene surrounded by a thin layer of poly(2‐vinylpyridine)—see Figure. Subsequent selective deposition of a metal film followed by etching results in surface patterning.