Premium
The Use of Soft Lithography to Fabricate Arrays of Schottky Diodes
Author(s) -
Hu Junmin,
Beck Rex G.,
Westervelt Robert M.,
Whitesides George M.
Publication year - 1998
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/(sici)1521-4095(199805)10:8<574::aid-adma574>3.0.co;2-d
Subject(s) - materials science , photolithography , fabrication , schottky diode , soft lithography , lithography , diode , nanotechnology , optoelectronics , medicine , alternative medicine , pathology
The fabrication of arrays of Schottky diodes on p‐type silicon is described using a representative soft lithographic technique: micromolding in capillaries (MIMIC). It is demonstrated that soft lithography is compatible with multilayer fabrication of electronically functional structures. The characteristics of the diodes were found to be similar to those fabricated by photolithography. The advantages and limitations of MIMIC are outlined, with particular attention being paid to the degree of registration of features that can be achieved.