Premium
Growth and Characterisation of Silicon Crystallites on Laser Structured Glass
Author(s) -
Boeck T.,
Teubner Th.,
Schmidt K.,
Wilde P.M.,
Lorenz M.
Publication year - 1999
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/(sici)1521-4079(199902)34:2<211::aid-crat211>3.0.co;2-p
Subject(s) - crystallite , materials science , nucleation , silicon , scanning electron microscope , focused ion beam , polycrystalline silicon , microporous material , substrate (aquarium) , nanotechnology , chemical engineering , crystallography , composite material , optoelectronics , chemistry , metallurgy , ion , oceanography , organic chemistry , layer (electronics) , geology , engineering , thin film transistor
Selective growth of silicon crystallites on glass, seeded from silicon saturated metallic solution droplets is demonstrated. These droplets are deposited in micropore arrays which are generated in the glass substrate by ultrashort laser pulses. In this way, an equidistant distribution of crystallites can be achieved by preferred nucleation in the micropores. Additionally, a crystallite selection occurs corresponding to the tip geometry. The material transport is governed by the vapour‐liquid‐solid (VLS) mechanism. The morphological characterization of micropores and grown crystallites is performed by Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM) and Focused Ion Beam (FIB) method.