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A Magnetic Multipole Plasma Source for the Investigation of Electron‐Atom Collision Processes
Author(s) -
Maurmann S.,
Drepper P.,
Ferri S.,
Petershagen N.
Publication year - 2000
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/(sici)1521-3986(200004)40:1/2<152::aid-ctpp152>3.0.co;2-j
Subject(s) - multipole expansion , plasma , atomic physics , langmuir probe , argon , electron , electron temperature , helium , atom (system on chip) , magnetic field , plasma parameters , physics , electron density , range (aeronautics) , materials science , plasma diagnostics , nuclear physics , quantum mechanics , computer science , composite material , embedded system
The investigation of electron‐atom collision processes requires a uniform, quiet, field‐free, dense plasma at low gas pressures. It can be generated in a magnetic multipole discharge. We present the design of the employed magnetic multipole plasma source as well as the characteristics and the plasma parameter evaluation of the multipole plasma in helium and argon discharges. Electron temperature and density are obtained spatially resolved with a Langmuir probe and are in the range of 1 eV < kT e < 10 eV and 10 11 cm —3 < n e < 10 13 cm —3 , respectively, at gas filling pressures of 1 Pa ≤ p g ≤ 5 Pa.