Premium
Fourier Analysis of X‐Ray Rocking Curves from Superlattices
Author(s) -
Podorov S.G.,
Hölzer G.,
Förster E.,
Faleev N.N.
Publication year - 1999
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/(sici)1521-3951(199906)213:2<317::aid-pssb317>3.0.co;2-s
Subject(s) - superlattice , fourier transform , fourier analysis , diffraction , fourier series , reflection (computer programming) , optics , x ray , x ray crystallography , materials science , substrate (aquarium) , x ray absorption spectroscopy , computational physics , physics , mathematical analysis , mathematics , absorption spectroscopy , optoelectronics , computer science , geology , oceanography , programming language
A new evaluation method based on the Fourier analysis of X‐ray diffraction data is proposed for the determination of the structural characteristics of superlattices. The method uses the Fourier transforms of the measurable X‐ray reflection intensity. Using simple analytical equations the depth‐dependent distributions of strain and integral characteristics (average strain and multilayer thickness) can be determined. The utility of this approach is demonstrated by analyzing experimental data from an In x Ga 1— x As–GaAs superlattice on a GaAs substrate.