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XYΘ actuators using piezoelectric and electromagnetic actuators
Author(s) -
Kato Haruna,
Hayakawa Kazuaki,
Torii Akihiro,
Ueda Akiteru
Publication year - 2000
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/(sici)1520-6416(200006)131:4<44::aid-eej6>3.0.co;2-r
Subject(s) - actuator , piezoelectricity , acoustics , high resolution , type (biology) , mechanical engineering , electrical engineering , materials science , control theory (sociology) , engineering , physics , computer science , artificial intelligence , control (management) , ecology , remote sensing , geology , biology
Microactuators with multiple degrees of freedom, which can provide many benefits in precision engineering, are in demand for industrial applications. We propose two new actuators ( Y ‐type and Δ‐type) which can move in the x , y , and θ directions. They are combinations of piezoelectric and electromagnetic actuators. The proposed actuators realize high resolution via the piezoelectric actuators. We describe the structure and principle of the proposed actuators, and discuss their feasibility. A resolution of 70 nm in the x direction and of 0.5 μrad in the θ direction was obtained with the Y ‐type actuator. A resolution of 90 nm in the x direction and of 0.6 μrad in the θ direction was obtained with the Δ‐type actuator. © 2000 Scripta Technica, Electr Eng Jpn, 131(4): 44–51, 2000