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Characteristics of scanning magnetic field‐type coaxial ECR plasma for inner coating of slender tubes
Author(s) -
Morisaki Eiichiro,
Nagano Tetsuhira,
Fujiyama Hiroshi
Publication year - 2000
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/(sici)1520-6416(20000130)130:2<18::aid-eej3>3.0.co;2-q
Subject(s) - coaxial , plasma , materials science , torr , coating , magnetic field , tube (container) , electron cyclotron resonance , atomic physics , nuclear magnetic resonance , physics , composite material , electrical engineering , engineering , quantum mechanics , thermodynamics
We have developed an inner coating system by using transported coaxial ECR plasmas. The ECR plasmas generated inside a coaxial tube were transported along the tube axis by controlling applied magnetic field. The ECR plasma was generated near the resonance points as the pressure was decreased. It was found that the control of plasma position was possible at pressures below 1 mTorr. Increases of the electron density and the deposition rate were achieved by generating a mirror magnetic field. © 1999 Scripta Technica, Electr Eng Jpn, 130(2): 18–24, 2000