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An improved laser ablation method using a shadow mask (eclipse method)
Author(s) -
Tachiki Minoru,
Kobayashi Takeshi
Publication year - 2000
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/(sici)1520-6416(200001)130:1<88::aid-eej11>3.0.co;2-l
Subject(s) - shadow mask , eclipse , ablation , laser ablation , materials science , substrate (aquarium) , shadow (psychology) , laser , optics , process (computing) , optoelectronics , computer science , engineering , physics , psychology , oceanography , astronomy , aerospace engineering , geology , psychotherapist , operating system
To eliminate droplet formation during the laser ablation thin film growth process, we proposed a new laser ablation technique, the “eclipse method,” which facilitated removing this droplet problem completely. In particular, YBa 2 Cu 3 O y films obtained by this method had T c ˜93 K and droplet‐free surfaces. To achieve growth rate enhancement in the low‐pressure condition and to introduce the activated species on the substrate in the eclipse method, we further proposed a new composite shadow mask method, the “eclipse angle method.” Furthermore, we found the Ar addition effect to improve the film qualities of Bi‐layered crystals. © 1999 Scripta Technica, Electr Eng Jpn, 130(1): 88–94, 2000